Sub-5 nm AFM Tip Characterizer Based on Multilayer Deposition Technology

Atomic force microscope (AFM) is commonly used for three-dimensional characterization of the surface morphology structures at nanoscale, but “Inflation effect” tip an important factor affecting accuracy. A characterizer has advantages in situ measurement, higher accuracy probe inversion results, and relatively simple fabrication process. In this paper, we developed a rectangular based on multilayer film deposition technology with protruding critical dimension parts grooves parts. And highly consistent across line widths grooves, still performs well even sub-5 nm width characterizer. This indicates that characterizers produced by method can synergistically meet combined requirements standard structure, very small edge roughness, geometry dimension, traceable measurements.